RESEARCH
Publications
No | APCTP2017-76 |
---|---|
Type | Publications by APCTP members |
Title | Extended scaling and Paschen law for micro-sized radiofrequency plasma breakdown |
Journal Title | Plasma Sources Science and Technology |
ISBN_ISSN | 0963-0252 |
APCTP Author | |
All Authors | Min Uk Lee, Jimo Lee, Jae Koo Lee, Gunsu S Yun |
Year | 2017 |
Volume No | 26 |
First page | 1 |
Last page | 7 |
SCI/Non SCI | SCI |
Domestic/International | International |
DOI/Arxiv No. | 10.1088/1361-6595/aa52a8 |